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Based on Innofocus’ understanding of fabricating micro-optical components, we use laser 3D nano-printing to fabricate micro-lens arrays in a way that overcomes the problems faced by traditional processes. There are two main methods:

Even though the exposure process can be consistently controlled, without accurate control of its surface morphology during the heating process, the quality of each array of microlens is difficult to maintain. This results in low yield and repeatability.

The fabrication of NanoPrint 3D Intelligent Laser Nano-fabrication system, based on the non-linear action of laser and matter, can realize three-dimensional high-precision micro-nano structures in a variety of materials, providing a new idea for micro-optical component fabrication. It also utilizes the technology of multi-focus parallel processing, which can increase the fabrication efficiency and productivity hundreds of times, pushing the laser direct writing technology from the laboratory to the production manufacturing environment.

Accurate control of the quality of microlens arrays can be achieved on the basis of high accuracy and uniformity, resulting in high yield rates.

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As controlled by heating, the curvature of each lens depends on the temperature applied to that lens. The difference in temperature will cause a difference in curvature and thus affecting the focal length. Also, even if the temperatures are all the same, there is no guarantee that each lens will develop the same change in curvature under heated conditions. Therefore the uniformity of the lens array is not guaranteed.

VCSELarray

Three-dimensional micro-nano structures can be designed to enhance the interaction between the local optical field and matter, thus giving rise to a variety of linear and non-linear optical phenomena and shortening the scale of action, thus effectively achieving miniaturization, integration and low energy consumption of devices. For example, Nanoprint 3D Intelligent Laser Nano-Fabrication system can realize various miniature diffractive optical elements including micro-lens, integrated grating, and waveband sheet, which can play a great role in imaging, wavelength selection and dispersion compensation.

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In addition, the NanoPrint system’s unique high-power femtosecond laser enables interaction with different materials such as glass, silicon, sulfur-based glass, and lithium niobate crystals. These materials can effectively introduce nonlinear optical interactions for wavelength conversion, optical switching, nonlinear tuning, etc. Nonlinear interactions in nanoscale waveguides can be exploited to generate effective sources of entangled photons for quantum optics. Femtosecond lasers can introduce ultra-high refractive index changes in optical fibers, bulk glass, and two-dimensional materials to form high-quality optical waveguides, ultra-thin devices, and complex three-dimensional integrated optical systems such as optical connectors and on-chip integration, which are essential enabling components for ultrafast, ultra-high-capacity, and quantum communications

Fig. 1. The microlens array designed by Innofocus. As shown in the figure, the microlens array are all in the same plane, while forming a dense structure with no gaps in between.

2) The polymeric microlens array is then used as a mask to transfer the pattern onto the quartz substrate by means of etching

GRIN lens

Femtosecond laser processing with the NanoPrint 3D Intelligent Nano-fabrication system allows direct writing of micro-, sub-micron and even nano-scale 3D micro and nano structures in transparent media, with the advantages of maskless, flexible structure, simple design and fast processing speed. By combining with different optical materials, it can achieve a wide range of applications in the field of all-optical communication, especially in the fabrication of diffractive optics, integrated optics, on-chip optics, silicon photonics, nano-optics, and quantum optics, which stand out among the many micro and nano fabrication technologies and become increasingly important in enabling technology.

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The laser 3D nano-fabrication technology represented by NanoPrint system has realized the fabrication of aspheric lenses, microlens arrays, pyramidal microstructure surfaces, reflection-reducing gratings, free-form optical elements and other structures with advantages that traditional fabrication equipment does not have, such as flexible structure design, high precision and high speed. It is mainly characterized by the ability to fabricate true three-dimensional structures with nanometer-level precision.

2020122 — Magnification in terms of u and "v". The magnification produced by a lens is equal to the ratio of image distance to the object distance.

ThorlabsMicrolens Array

The spatial position of each microlens is used to create the surface profile of the microlens accordingly, resulting in a microlens array that meets the specific light field distribution.

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Fresnel lens

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1) A high power laser is used to introduce a phase transition directly inside the quartz glass by means of a femtosecond laser to write the anti-structure of the microlens array

Driven by the application demand, the research on micro-optical component fabrication technology is also in progress. In addition to the traditional ultra-precision mechanical fabrication technology, a variety of modern fabrication technologies have also emerged, such as electron beam writing technology, photolithography, etching technology, replication technology and coating technology. These technologies are developed from microelectronic component microfabrication technology, but unlike the original electronic components, three-dimensional molding accuracy and assembly accuracy is critical for optical components, will directly affect their performance, so each of these methods has its own defects and limitations of use. Generally speaking, machining accuracy and machining speed and output are conflicting goals that are difficult to balance.

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Microlens

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The cost of laser processing is extremely low as no mask production is required, and each new lens array design only requires the generation of a new processing file, allowing for rapid design optimisation comparisons

As photolithography is a process for producing two-dimensional graphics, there is no direct control over the three-dimensional surface morphology of the lens fabricated. However, the focal length and image quality depend heavily on the surface morphology. Therefore, the focal length of the lens and the quality of image are seriously compromised when the surface morphology cannot be accurately controlled. In addition, due to the method of forming an arch by heating, the most likely surface morphology to be formed by thermal stabilisation is spherical according to the principle of uniform distribution of heat deformation, which cannot be accurately controlled. Furthermore, the resolution of imaging is greatly limited because the method of heating the surface to form an arch does not allow for the creation of lenses with a small radius of curvature to achieve high numerical apertures.

This process has three requirements for photoresists: 1) photosensitivity to UV light. 2) can be deformed by heat to form an arch. 3) The ability to resist argon-ion engraving for pattern transfer. Only particular photoresists can meet these requirements at the same time and so the choice is severely limited.

Cylindrical lensarray

The commonly used photoresist method of producing graphics with engraving is not freely adjustable as the design of the lens needs to be determined by the mask plate graphics, and is costly, requiring processing of the mask plate for each new design of the lens array. In addition, each new design involves the fabrication of a new mask plate, resulting in a complicated and time-consuming process.

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Micro-optical components are key components in the manufacture of small optoelectronic systems, which have the advantages of small size, light weight, low cost, and can achieve novel functions such as tiny, array, integration, imaging and wavefront conversion that are difficult to achieve with ordinary optical components. At present, miniaturization and integration of optical systems have become a major trend in various applications. Micro-optics are playing an increasing role in optical imaging and display systems, optoelectronic systems, laser devices, thermal imaging devices, night vision devices, infrared scanning devices, display systems, camera systems, zoom lenses, medical diagnostic fundoscopes, endoscopes, progressive lenses, cell phones, PDAs, CDs and DVDs, etc.

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One important branch of computational imaging is light field imaging. The core optical element in optical field imaging is the microlens array, which is made of transparent glass with many tiny lenses engraved on its surface to form an array structure for imaging. The relatively established process for making quartz microlenses is photoresist patterning with engraving, but there are various problems with this method.

Thanks to the precise control of the structure's three-dimensional surface morphology by laser nano-3D printing technology, the accurate processing of microlenses of arbitrary design can be achieved. The errors in the surface profile can be controlled within 10nm to sufficiently satisfy the fabrication demands.