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White-light interferometry is a well-established method for measuring the height profiles of samples with rough as well as with smooth surfaces. Because white-light interferometry uses broadband light sources, the problem of dispersion arises. Because the optical paths in the two interferometer arms cannot be balanced for all wavelengths, the white-light correlogram is distorted, which interferes with its evaluation. We investigate the influence of setup parameters on the shape of the correlogram. Calculated values are compared with experimental results.

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White-light interferometry is a well-established method for measuring the height profiles of samples with rough as well as with smooth surfaces. Because white-light interferometry uses broadband light sources, the problem of dispersion arises. Because the optical paths in the two interferometer arms cannot be balanced for all wavelengths, the white-light correlogram is distorted, which interferes with its evaluation. We investigate the influence of setup parameters on the shape of the correlogram. Calculated values are compared with experimental results.

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P. Pavliček (pavlicek@optnw.upol.cz) and J. Soubusta are with the Joint Laboratory of Optics of Palacky University and Institute of Physics of the Academy of Sciences of the Czech Republic, Tř. 17. Listopadu 50, CZ-772 07 Olomouc, Czech Republic.