High Luminance Fiber Light (2SLG)

High Luminance Fiber Light 
In semiconductor manufacturing processes, fully automated wafer defect inspection technology imposes stringent requirements on optical imaging performance. The inspection encompasses both bright-field and dark-field modalities, with the majority of illumination sources employing high-brightness fiber optics to detect surface defects on silicon wafers (such as edge chipping, corner missing, and surface contamination). LOTS AUTOMATION newly upgraded second-generation high luminance fiber light source demonstrates a 60% luminance enhancement in the 2SLG250 model compared to the 2SLG150-W. Characterized by superior luminous efficacy and reduced heat generation, this advanced light source represents the optimal solution for semiconductor inspection applications. 
 

 

Filter Wheel

Features:

1.Switch filters to output multi-band colors. 
2.Fast color switch supports various processes and inspections. 
3.Filters are replaced once the front cover is removed. 
4.Filter switching is realized via the front panel, RS232, LAN or external trigger signals. 
5.5 color filters included (Custom wavelengths available upon inquiry.) 

 

Applications:

1.Wafer Inspection: Surface particles, scratches, contaminants and photoresist residues are inspected. 
2.Chip Packaging Inspection: Detect gold wire defects, pad contaminants and packaging bubbles. 
3.OLED Panel Inspection: Screen dots, scratches, and dirt on the polarizing filter. 
4.Microscopic Optical Imaging Inspection:Metallographic observation & material multi-spectral micro inspection.

Model 2SLG265-W (RGBWY) is equipped with a filter wheel converter. 
 
*Above are brightness percentages of different filters (grayscale imaging test data) for reference. 

Image grayscale contrast chart  
 

Optional 4 light-collecting lenses

 

Fiber connector(mm)

Fiber optic size(mm)

 

Fiber optic size(mm)