Viewing and Projection Eyepieces | Nikon's MicroscopyU - ocular function microscope
Extremeultraviolet lithography machine
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4 Flutes 6mm carbide endmill 55 HRC total length is 50/75/100/150mm. It has a bronze TiSiN coating for a better life. used for Face, Shoulder, side mill, ...
Extreme UVwavelength
Bandpassfilter for the frequencies between 2300MHz and 2600MHz.
Extreme uv lightuses
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Yaw, pitch, and roll rotations.
Field of View = Field Number (FN) ÷ Objective Magnification · Field of View = 20mm / 10 = 2.0 mm.
Extremeultraviolet lithography
Extreme uv lightlithography
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Each part of the compound microscope serves its own unique function, with each being important to the function of the scope as a whole. The individual parts of a compound microscope can vary heavily depending on the configuration & applications that the scope is being used for. Common compound microscope parts include:
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Extreme ultraviolet (EUV) light at the desired wavelength, 13.5 nm, is created through very high energy releases of photons due to the de-excitation of heavily ionized tin, Sn14+. This degree of ionization is only possible in a strong plasma, which in industry is created by irradiating tin droplets with a high-power laser. A large problem associated with this type of EUV source is tin debris buildup on the mirror, leading to reduced EUV intensity over time as the mirror gets dirtier. Previously, work has been done at the Center for Plasma-Material Interactions (CPMI) to use a hydrogen plasma to etch the tin off the surface of the mirror, effectively cleaning it in-situ. Although effective for cleaning, debris can still damage the mirror due to high energies. A small scale EUV source has been created, allowing for less intensive experimentation on tin debris within the chamber. This source is called MK-III and is shown on the right. The laser is pulsed at various powers, creating varying intensities of EUV as plotted below. After laser pulses, the tin target is irradiated, creating EUV light and creating tin debris within the chamber. Hydrogen gas is flowed in the chamber at 100 sccm at various pressures, finding better debris removal at lower pressures as shown in the SEM images.
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