White light interferometryapplications

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White light interferometryprinciple

White light interferometry (WLI) is a non-destructive, non-contact, optical surface topography measurement that uses coherence scanning interferometry to generate 2D and 3D models of surface height.

White light interferometryvs confocal

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White light interferometryresolution

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White light interferometry (WLI) is a non-destructive, non-contact, optical surface topography measurement that uses coherence scanning interferometry to generate 2D and 3D models of surface height.

White light interferometrymicroscope

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3D WLI measurement: the figure of Lincoln sitting in his monument on the surface of a US 1 cent coin (barely visible with the naked eye), visualized clearly with WLI.

The two beams, when mixed, form an interference pattern whose intensity can be related to the sample surface height: any difference in optical path length between the reference and sample beams changes the measured interference intensity at each scanned point, providing an indirect measure of the height variance in the sample.

A beam-splitter divides the white light beam into two optical paths: one that reflects or scatters from the sample and one that reflects from a flat, known reference mirror. These two signal beams are then mixed together and the resulting image is projected onto a CCD image sensor.