A twice oblique ion beam etching method is proposed to fabricate triangular blazed gratings that have controllable both blaze angle and anti-blaze angle. The anti-blaze angle is controlled by first obliquely etching the photoresist mask to obtain an asymmetrical trapezoidal grating, one sidewall of which then evolves into the anti-blaze facet in the second etch step. The blaze angle is controlled by obliquely etching the asymmetrical trapezoidal grating to obtain a triangular blazed grating. We show the key process steps of the method by fabricating a blazed grating with the blaze angle of 20.9° and the anti-blaze angle of 89.0°. The method is verified not only to increase the anti-blaze angle to near 90°, but also have a good tolerance against over-etching.

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Blazed transmissiongrating

A twice oblique ion beam etching method is proposed to fabricate triangular blazed gratings that have controllable both blaze angle and anti-blaze angle. The anti-blaze angle is controlled by first obliquely etching the photoresist mask to obtain an asymmetrical trapezoidal grating, one sidewall of which then evolves into the anti-blaze facet in the second etch step. The blaze angle is controlled by obliquely etching the asymmetrical trapezoidal grating to obtain a triangular blazed grating. We show the key process steps of the method by fabricating a blazed grating with the blaze angle of 20.9° and the anti-blaze angle of 89.0°. The method is verified not only to increase the anti-blaze angle to near 90°, but also have a good tolerance against over-etching.

Image

Blazedgratingefficiency

Dmitriy L. Voronov, Sooyeon Park, Eric M. Gullikson, Farhad Salmassi, and Howard A. Padmore Opt. Express 31(16) 26724-26734 (2023)

Diffractiongrating

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Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

Echelettegrating

Chen Shen, Xin Tan, Qingbin Jiao, Wei Zhang, Na Wu, Heshig Bayan, and Xiangdong Qi Opt. Express 26(19) 25381-25398 (2018)

tl;dr you probably wont notice a thing. It may affect signal integrity. But you're nowhere near the limits of cable length. So if your cables ...

Marcell Kiss, Teodoro Graziosi, Adrien Toros, Toralf Scharf, Christian Santschi, Olivier J. F. Martin, and Niels Quack Opt. Express 27(21) 30371-30379 (2019)

Blazedgratingequation

GCD-501100M High precision motorized linear stage is newly developed by Daheng. GCD-501100M consists of high precision ball screw and fine linear guide. The ...

Jie Yuan, Xingyu Li, Lulu Guan, Zhuang Liu, Shuo Dong, Yuxin Yang, Kaidong Xu, and Shiwei Zhuang Opt. Mater. Express 13(5) 1249-1258 (2023)

1State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China

Grating blazewavelength

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POLARIZE meaning: 1 : to cause (people, opinions, etc.) to separate into opposing groups; 2 : to cause (something, such as light waves) to vibrate in a ...

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Optical telescopes view distant objects using refractive, reflective, or combined optics. Key parameters include magnification and resolution.

Holographicgrating

Blazedgratingpdf

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At dark sites I don't notice it but in town it does make a noticeable difference if there is a lot of stray light. I used flocking paper ...

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The most important imaging component in the optical microscope is the objective, a complex multi-lens assembly that focuses light waves originating from the ...