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1State Key Laboratory for Manufacturing System Engineering and Shaanxi Key Laboratory of Photonics Technology for Information, School of Electronics & Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China

Zhihao Chen, Hongbing Yuan, Peichao Wu, Wenwu Zhang, Saulius Juodkazis, Haibo Huang, and Xiaowen Cao Opt. Lett. 47(1) 22-25 (2022)

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Jian-Guan Hua, Hang Ren, Ao Jia, Zhen-Nan Tian, Lei Wang, Saulius Juodkazis, Qi-Dai Chen, and Hong-Bo Sun Opt. Lett. 45(3) 636-639 (2020)

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In this Letter, a low-cost refractive convex microlens array device based on infrared a polymer is fabricated by a nanoimprinting technique. The device integrates more than 4000 microlenslets within a footprint of 10  mm×10  mm. The surface quality, spectral transmittance, imaging resolution, and surface damage threshold of the device have been fully characterized. The IR imaging and parallel laser inscription experiments confirm the remarkable optical performance of the fabricated device. Owing to the merits of high optical quality, low fluence lose, and simple fabrication, this device is promising in cutting-edge IR applications, such as IR imaging, laser fabrication, and so on.

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In this Letter, a low-cost refractive convex microlens array device based on infrared a polymer is fabricated by a nanoimprinting technique. The device integrates more than 4000 microlenslets within a footprint of 10  mm×10  mm. The surface quality, spectral transmittance, imaging resolution, and surface damage threshold of the device have been fully characterized. The IR imaging and parallel laser inscription experiments confirm the remarkable optical performance of the fabricated device. Owing to the merits of high optical quality, low fluence lose, and simple fabrication, this device is promising in cutting-edge IR applications, such as IR imaging, laser fabrication, and so on.

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3International Joint Research Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University, Xi’an 710049, China